Infocommunications and Radio Technologies Infocommunications and Radio Technologies ИНФОКОММУНИКАЦИОННЫЕ И РАДИОЭЛЕКТРОННЫЕ ТЕХНОЛОГИИ 2587-9936 53201 10.29039/2587-9936.2022.05.1.04 Электроника, фотоника, приборостроение и связь (2.2) ELECTRONICS, PHOTONICS, INSTRUMENTATION AND COMMUNICATIONS (2.2) Электроника, фотоника, приборостроение и связь (2.2) Planar Slow-Wave Structures for Millimeter Wave Band TWT Планарные замедляющие системы для ЛБВ миллиметрового диапазона длин волн Богомолова Евгения Александровна Bogomolova Evgeniya Aleksandrovna

кандидат технических наук;

candidate of technical sciences;

 Галдецкий Анатолий Васильевич Galdeckiy Anatoliy Vasil'evich galdetskiy@istokmw.ru

кандидат физико-математических наук;

candidate of physical and mathematical sciences;

 Савин Александр Николаевич Savin Aleksandr Nikolaevich

кандидат технических наук;

candidate of technical sciences;

 АО «НПП “Исток” имени А. И. Шокина» Фрязино Россия Scientific and production enterprise “Istok” n. a. A. I. Shokin Fryazino Russian Federation АО «НПП “Исток” имени А. И. Шокина» Фрязино Россия Scientific and production enterprise “Istok” n. a. A. I. Shokin Fryazino Russian Federation АО «НПП “Исток” имени А. И. Шокина» Фрязино Россия Scientific and production enterprise “Istok” n. a. A. I. Shokin Fryazino Russian Federation 25 03 2022 25 03 2022 5 1 54 69 20 03 2022 05 06 2022 https://rusjbpc.ru/en/nauka/article/53201/view

Рассмотрены достижения, проблемы и особенности в разработке планарных замедляющих систем для ЛБВ миллиметрового диапазона. Обзор характеристик планарных замедляющих систем для ЛБВ мм-диапазона, изготавливаемых с помощью технологии фотолитографии, предоставляет разработчикам возможность выбора высокотехнологичных конструкций замедляющих систем планарного типа для создания эффективных широкополосных ЛБВ.

Achievements, problems and features in the development of planar slow-wave systems for TWTs in the millimeter range are considered. In this article, a review of the characteristics of planar slow-wave systems for mm-band TWTs manufactured using photolithography is presented, which provides the opportunity for researchers and manufacturers to select high-tech designs of planar slow-wave systems for creating efficient broadband TWTs.

 замедляющая система электронный пучок алмаз ЛБВ дисперсия токооседание slow-wave structure electron beam diamond TWT dispersion beam intercept

Andre Frederic [et al.] Technology, Assembly, and Test of a W-band TWT for New 5 G High-Capacity Networks // IEEE Transactions on electron devices. 2020. Vol. 67, no. 7. P. 2919-2924. F. Andre, “Technology, Assembly, and Test of a W-Band Traveling Wave Tube for New 5G High-Capacity Networks,” IEEE Transactions on Electron Devices, vol. 67, no. 7, pp. 2919-2924, 2020, doi: 10.1109/ted.2020.2993243. Glyavin M. Y., Idehara T., Sabchevski S. P. Development of THz gyrotrons at IAP RAS and FIR UF and their applications in physical research and highpower THz technologies // IEEE Trans. Terahertz Sci. Technol. 2015. Vol. 5, no. 5. P. 788-797. M. Y. Glyavin, T. Idehara, and S. P. Sabchevski, “Development of THz Gyrotrons at IAP RAS and FIR UF and Their Applications in Physical Research and High-Power THz Tech-nologies,” IEEE Transactions on Terahertz Science and Technology, vol. 5, no. 5, pp. 788-797, 2015, doi: 10.1109/tthz.2015.2442836. Dayton J. A., Kory C. L., Mearini G. T. Microfabricated mm-wave TWT platform for wire-less backhaul. In: Abstracts of the Sixteenth IEEE International Vacuum Electronics Confer-ence (IVEC2015). (Beijing, China, April 27-29, 2015). P. 1-2. J. A. Dayton, C. L. Kory, and G. T. Mearini, “Microfabricated mm-wave TWT platform for wireless backhaul,” 2015 IEEE International Vacuum Electronics Conference (IVEC), 2015, doi: 10.1109/ivec.2015.7223799. Галдецкий А. В., Сапрынская Л. А., Соколова И. М., Натура И. П., Корчагин А. И. Мощная ЛБВ миллиметрового диапазона с прецизионной технологией изготовления со-гласующих элементов конструкции // Радиотехника. 2019. Т. 83, № 7 (10). С 73-82. A. V. Galdetsky, L. A. Saprynskaya, I. M. Sokolova, I. P. Natura, and A. I. Korchagin, “Powerful millimeter wave TWT with precision manufacturing technology for matching structural elements,” Radiotekhnika, vol. 83, no. 7 (10), pp. 73-82, 2019. (In Russ.). Wang J., Zhang D., Liu C. и др. UNIPIC code for simulations of high power microwave devices // Physics of Plasmas. 2009. Vol. 16, no 3. P. 0331081-03310810. J. Wang, “UNIPICcode for simulations of high power microwave devices,” Physics of Plasmas, vol. 16, no. 3, p. 033108, 2009, doi: 10.1063/1.3091931. CST STUDIO SUITE - ELECTROMAGNETIC FIELD SIMULATION SOFTWARE. URL: https://www.3ds.com/products-services/simulia/products/cst-studio-suite/?utm_source=cst.com&utm_medium=301& utm_campaign =cst (дата обращения: 12.07.2021). “CST Studio Suite - Electromagnetic Field Simulation Software [Advertisement],” URL: https://www.3ds.com/products-services/simulia/products/cst-studio-suite/? utm_source=cst.com&utm_medium=301& utm_campaign =cst [Accessed July 12, 2021]. Understand, Predict and Optimize Physics-Based Designs and Processes with COMSOL Multiphysics. URL: https://www.comsol.com/comsol-multiphysics (дата обращения: 15.09.2021). “Understand, Predict and Optimize Physics-Based Designs and Processes with COMSOL Multiphysics [Advertisement],” URL: https://www.comsol.com/comsol-multiphysics [Accessed Sept. 15, 2021]. Starinshak D. P., Smith N. D., Wilson J. D. Using COMSOL Multiphysics software to mod-el anisotropic dielectric and metamaterial effects in folded-waveguide traveling-wave tube slow-wave circuits. In: IEEE International Vacuum Electronics Conference IVEC 2008. (Monterey, California April 22-24, 2008). P. 162-163. D. P. Starinshak, N. D. Smith, and J. D. Wilson, “Using COMSOL Multiphysics software to model anisotropic dielectric and metamaterial effects in folded-waveguide traveling-wave tube slow-wave circuits,” 2008 IEEE International Vacuum Electronics Conference, 2008, doi: 10.1109/ivelec.2008.4556469. HFSS 3D Electromagnetic Field Simulator for RF and Wireless Design URL: https://www.ansys.com/Products/Electronics/ANSYS-HFSS (дата обращения: 10.11.2021). “HFSS 3D Electromagnetic Field Simulator for RF and Wireless [Advertisement],” [Online]. https://www.ansys.com/Products/Electronics/ANSYS-HFSS [Accessed Nov. 10, 2021]. Antonsen T. M. Jr., Levush B. CHRISTINE : A Multifrequency Parametric Simulation Code for Traveling Wave Tube Amplifiers. Washington : NRL Internal report, 1997. 39 p. T. M. Antonsen, Jr., B. Levush, CHRISTINE: A Multifrequency Parametric Simulation Code for Traveling Wave Tube Amplifiers. Washington: NRL Internal report, 1997. 39 p. Chernyavskiy I. A., Chernin D., Vlasov A. N. [at al.] Modeling of the wide-band coupled-cavity TWTS with the large-signal code TESLA-CC. In: Abstracts of IEEE International Conference on Plasma Science (ICOPS 2011). (Chicago, Illinois, USA, June 26-30, 2011). P. 1-1. I. A. Chernyavskiy, D. Chernin, A. Vlasov, B. Levush, T. Antonsen, and J. Legarra, “Model-ing of the wide-band coupled-cavity TWTS with the large-signal code TESLA-CC,” 2011 Ab-stracts IEEE International Conference on Plasma Science, 2011, doi: 10.1109/plasma.2011.5993000. Chernyavskiy I. A., Cooke S. J., Vlasov A. N. [at al.] Parallel Simulation of Independent Beam-Tunnels in Multiple-Beam Klystrons Using TESLA // IEEE Transactions on Plasma Science. 2008. Vol. 36, no 3. P. 670-681. I. A. Chernyavskiy, “Parallel Simulation of Independent Beam-Tunnels in Multiple-Beam Klys-trons Using TESLA,” IEEE Transactions on Plasma Science, vol. 36, no. 3, pp. 670-681, 2008, doi: 10.1109/tps.2008.920270. Chernyavskiy I. A., Petillo J. J., Vlasov A. N. [at al.] End-to-end analysis using MICHELLE and TESLA codes. In: IEEE International Conference on Plasma Science - Abstracts. (ICOPS 2009). (San Diego, CA, USA, June 1-5, 2009). P. 1-1. I. Chernyavskiy, J. Petillo, A. Vlasov, B. Levush, and E. Wright, “End-to-end analysis using MICHELLE and TESLA codes,” 2009 IEEE International Conference on Plasma Science - Abstracts, 2009, doi: 10.1109/plasma.2009.5227554. Chernyavskiy I. A., Vlasov A. N., Antonsen T. M. [at al.] Validation study of the TESLA model for extended interaction klystron // IEEE International Vacuum Electronics Conference (IVEC 2011). (Bangalore, Karnataka, India, Feb. 21-24, 2011). P. 89-90. I. A. Chernyavskiy, “Validation study of the TESLA model for extended interaction klystron,” 2011 IEEE International Vacuum Electronics Conference (IVEC), 2011, doi: 10.1109/ivec.2011.5746889. Chernyavskiy I. A., Vlasov A. N., Antonsen T. M. [at al.] Modeling of a G-band extended interaction klystron using the large-signal code TESLA // 35th International Conference on In-frared, Millimeter, and Terahertz Waves (IRMMW-THz 2010), (Rome, Italy, September 5-10, 2010). P. 1-2. I. A. Chernyavskiy, “Modeling of a G-band extended interaction klystron using the large-signal code TESLA,” 35th International Conference on Infrared, Millimeter, and Terahertz Waves, 2010, doi: 10.1109/icimw.2010.5613043. Chernyavskiy I. A., Vlasov A. N., Cooke S. J. [at al.] TESLA modeling of the linear-beam amplifiers. In: IEEE International Vacuum Electronics Conference - IVEC’09. (Rome, Italy, April 28-30, 2009). P. 121-122. I. A. Chernyavskiy, “TESLA modeling of the linear-beam amplifiers,” 2009 IEEE Interna-tional Vacuum Electronics Conference, 2009, doi: 10.1109/ivelec.2009.5193388. Cooke S. J., Vlasov A. N., Levush B. [at al.] GPU-accelerated 3D time-domain simulation of vacuum electron devices. In : IEEE International Vacuum Electronics Conference - IVEC 2011. (Bangalore, Karnataka, India, Feb. 21-24, 2011). P. 305-306. S. J. Cooke, A. N. Vlasov, B. Levush, I. A. Chernyavskiy, and T. M. Antonsen, “GPU-accelerated 3D time-domain simulation of vacuum electron devices,” 2011 IEEE International Vacuum Electronics Conference (IVEC), 2011, doi: 10.1109/ivec.2011.5746997. Vlasov A. N., Antonsen T. M., Chernin D. [at al.] Simulation of microwave devices with external cavities using MAGY. In: Third IEEE International Vacuum Electronics Conference - IVEC 2002. (Monterey, California, USA, April 23-25, 2002). P. 79-80. A. Vlasov, T. Antonsen, D. Chernin, B. Levush, and E. Wright, “Simulation of microwave devices with external cavities using MAGY,” Third IEEE International Vacuum Electronics Conference (IEEE Cat. No.02EX524), doi: 10.1109/ivelec.2002.999270. Vlasov A. N., Cooke S. J., Levush B. [at al.] 16.1 : 2D modeling of beam-wave interaction in coupled cavity TWT with TESLA. In: IEEE International Vacuum Electronics Conference - IVEC 2010. (Monterey, CA, USA, May 18-20, 2010). P. 405-406. A. N. Vlasov, S. J. Cooke, B. Levush, T. M. Antonsen, I. A. Chernyavskiy, and D. P. Cher-nin, “16.1: 2D modeling of beam-wave interaction in coupled cavity TWT with TESLA,” 2010 IEEE International Vacuum Electronics Conference (IVEC), 2010, doi: 10.1109/ivelec.2010.5503379. Borisov A. A., Budzinsky U. A., Bykovsky S. V. [at al.] The development of vacuum mi-crowave devices in Istok. In: IEEE International Vacuum Electronics Conference - IVEC 2011. (Bangalore, Karnataka, India, Feb. 21-24, 2011). P. 437-438. A. A. Borisov, “The development of vacuum microwave devices in Istok,” 2011 IEEE Inter-national Vacuum Electronics Conference (IVEC), 2011, doi: 10.1109/ivec.2011.5747063. Dayton J. A., Kory C. L., Mearini G. T. Microfabricated mm-wave TWT platform for wire-less backhaul. In: Abstracts of the Sixteenth IEEE International Vacuum Electronics Confer-ence - IVEC2015. (Beijing, China, April 27-29, 2015). P. 1-2. J. A. Dayton, C. L. Kory, and G. T. Mearini, “Microfabricated mm-wave TWT platform for wireless backhaul,” 2015 IEEE International Vacuum Electronics Conference (IVEC), 2015, doi: 10.1109/ivec.2015.7223799. Zaginaylov G. I., Gandel Y. V., Kamyshan O. P. [at al.] Full-wave analysis of the field distribu-tion of natural modes in the rectangular waveguide grating based on singular integral equation method // IEEE Transactions on Plasma Science. 2002. Vol. 30, no 3. P. 1151-1159. G. Zaginaylov, “Full-wave analysis of the field distribution of natural modes in the rectangular waveguide grating based on singular integral equation method,” IEEE Transactions on Plas-ma Science, vol. 30, no. 3, pp. 1151-1159, 2002, doi: 10.1109/tps.2002.801613. Каретникова Т. А. Линейная теория многосекционных широкополосных ЛБВ с неоднородной спиральной замедляющей системой // Известия вузов. Прикладная нелинейная динамика. 2012. Т. 20, № 6. С. 148-159. T. A. Karetnikova, “Linear theory of multisection broadband TWTs with an inhomogeneous spiral slow-wave system,” Izvestiya vuzov. Applied non-linear dynamics, vol. 20, no. 6, pp. 148-159, 2012. (In Russ.). Рожнёв А. Г., Рыскин Н. М., Каретникова Т. А. [и др.] Исследование характеристик замедляющей системы лампы бегущей волны миллиметрового диапазона с ленточным электронным пучком // Изв. вузов. Радиофизика. 2013. Т. 56, № 8. С. 601-613. A. G. Rozhnev, N. M. Ryskin, T. A. Karetnikova [et al.], “Investigation of the characteristics of the retarding system of a millimeter-wave traveling-wave lamp with a strip electron beam,” Izv. Vuzov. Radiophysics, vol. 56, no. 8. pp. 601-613, 2013. (In Russ.). Бушуев Н. А. Расчет собственных мод диафрагмированного волновода для гиро-приборов с замедленными волнами. В кн.: Proceedings of the 4th IEEE Saratov - Penza Chapter Workshop «Машинное проектирование в прикладной электродинамике и элек-тронике». (Саратов, Россия, 26 сент. 1999). С. 87-91. N. A. Bushuev, “Calculation of eigenmodes of a diaphragmed waveguide for gyro-devices with slow waves,” Proceedings of the 4th IEEE Saratov - Penza Chapter Workshop "Ma-chine Design in Applied Electrodynamics and Electronics" (Saratov, Russia, September 26, 1999), pp. 87-91. (In Russ.). Rozhnev A. G., Ryskin N. M., Sokolov D. V. [at al.] New 2.5D code for modeling of nonlinear multisignal amplification in a wideband helix traveling wave tube // In: Fifth IEEE International Vacuum Electronics Conference, (Monterey, California, April 27-29, 2004). P. 144-145. A. G. Rozhnev, N. M. Ryskin, D. V. Sokolov [at al.], “New 2.5D code for modeling of non-linear multisignal amplification in a wideband helix traveling wave tube,” Fifth IEEE Interna-tional Vacuum Electronics Conference, (Monterey, California, April 27-29, 2004). pp. 144-145. Гольденберг Б. Г. Базовые принципы LIGA-технологии. URL: www.ssrc.inp.nsk.su/CKP/lections/Theory_of_LIGA-tecnology.pdf (дата обращения: 10.11.2020). B. G. Goldenberg, “Basic principles of LIGA technology,” URL: www.ssrc.inp.nsk.su/CKP/ lections/Theory_of_LIGA-tecnology.pdf [Accessed Oct. 11, 2020]. (In Russ.). Thevenoud J. M., Mercier B., Bourouina T. [at al.] DRIE TECHNOLOGY : FROM MICRO TO NANOAPPLICATIONS. URL: https://www.researchgate.net/publication/228781147_(дата обращения: 10.12.2017). J. M. Thevenoud, B. Mercier, T. Bourouina [at al.], “Drie Technology: from Micro to Nanoapplications,” URL: https://www.researchgate.net/publication/228781147_ [Accessed Oct. 12, 2017]. Rai-Choudhury P., ed. MEMS and MOEMS Technology and Applications. SPIE PRESS BOOK, 2000. 528 p. “MEMS and MOEMS Technology and Applications,” 2000, doi: 10.1117/3.2265068. Siegel P. H. Terahertz technology // IEEE Transactions on Microwave Theory and Tech-niques. 2002. Vol. 50, no 3. P. 910-928. P. Siegel, “Terahertz technology,” IEEE Transactions on Microwave Theory and Techniques, vol. 50, no. 3, pp. 910-928, 2002, doi: 10.1109/22.989974. Carlsten B. E., Russell S. J., Earley L. M. [at al.] Technology development for a mm-wave sheet-beam traveling-wave tube // IEEE Transactions on Plasma Science. 2005. Vol. 33, no 1. P. 85-93. B. Carlsten, “Technology development for a mm-wave sheet-beam traveling-wave tube,” IEEE Transactions on Plasma Science, vol. 33, no. 1, pp. 85-93, 2005, doi: 10.1109/tps.2004.841172. Duo Xu, Wei Shao [et al.] A semi-analytic numerical algorithm of diamond pillbox windows for terahertz vacuum electron device applications // IEEE Electron Device Letters. 2021. Vol. 42, no. 2, P. 252-255. D. Xu, “A Semi-Analytic Numerical Algorithm of Diamond Pillbox Windows for Terahertz Vacuum Electron Device Applications,” IEEE Electron Device Letters, vol. 42, no. 2, pp. 252-255, 2021, doi: 10.1109/led.2020.3045531. Shangsong Xin, Yanyu Wei, Lingna Yue, Jin Xu, Hairong Yin, Wenxiang Wang, Research on a 3-D Microstrip Meander-line Slow-wave Structure Traveling Wave Tube. In: IEEE In-ternational Vacuum Electronics Conference IVEC 2021 (Virtual Event April 28-30, 2021). P. 58-59. S. Xin, J. Xu, H. Yin, Y. Wei, L. Yue, and W. Wang, “Research on a 3-D Microstrip Mean-der-line Slow-wave Structure Traveling Wave Tube,” 2021 22nd International Vacuum Elec-tronics Conference (IVEC), 2021, doi: 10.1109/ivec51707.2021.9722436. Juan Socuellamos, Rosa Letizia, Roberto Dionisio, Claudio Paoloni, Pillared Meander Line Slow Wave Structure for W-band Traveling Wave Tube. In: IEEE International Vacuum Elec-tronics Conference IVEC 2021. (Virtual Event April 28-30 2021). P. 74-75. J. M. Socuellamos, R. Letizia, R. Dionisio, and C. Paoloni, “Pillared Meander Line Slow Wave Structure for W-band Traveling Wave Tubes,” 2021 22nd International Vacuum Elec-tronics Conference (IVEC), 2021, doi: 10.1109/ivec51707.2021.9722426. Yang Xie, Ningfeng Bai, Xiaohan Sun, Pan Pan, Jun Cai, Jinjun Feng, Design and Fabrica-tion of D-band Planar Double Microstrip Meander Line Slow Wave Structure. In : IEEE In-ternational Vacuum Electronics Conference - IVEC 2021. (Virtual Event April 28-30, 2021). P. 106-107. Y. Xie, N. Bai, X. Sun, P. Pan, J. Cai, and J. Feng, “Design and Fabrication of D-band Planar Double Microstrip Meander Line Slow Wave Structure,” 2021 22nd International Vacuum Electronics Conference (IVEC), 2021, doi: 10.1109/ivec51707.2021.9722535. Mannette R., Shaw B., Henry H., An M-type backward-wave oscillator with photocopied delay line // Electronics. 1966. Vol. 39, no. 4. R. Mannette, B. Shaw, and F. Hendry, “An m-type backward-wave oscillator with photocop-ied delay line,” 1965 International Electron Devices Meeting, 1965, doi: 10.1109/iedm.1965.187554. Printed-circuit TWT’s promis cost cuts // Electronics. 1972. Vol. 45, no. 25. P. 35-36. “Printed-circuit TWT’s promis cost cuts,” Electronics, vol. 45, no. 25, pp. 35-36, 1972. Scott A. W. Next in tubes the printed circuit TWT // Electronic Design. 1972. Vol. 20, no. 26. P. 28, 30. A. W. Scott, “Next in tubes the printed circuit TWT,” Electronic Design, vol. 20, no. 26. pp. 28, 30, 1972. Ракова Е. А. Проектирование ЛБВ W-диапазона с замедляющей системой на алмазном теплоотводе. В сб.: Научно-технический сборник «Успехи современной радиоэлектроники». 2016. № 2. С. 51. E. A. Rakova, “Designing a W-band TWT with a moderating system based on a diamond heat sink,” Advances in modern radio electronics, no. 2, p. 51, 2016. (In Russ.). Галдецкий А. В., Богомолова Е. А. Замедляющая система планарного типа. Патент РФ № 2653573, приоритет от 06.03.2017 г. A. V. Galdetsky and E. A. Bogomolova, “Planar type slow-motion system,” Patent of the Russian Federation No. 2653573, priority dated March 6, 2017. (In Russ.).