%0 Journal Article
%T Method of metrological characteristics determination of probe system for wafer-level S-parameters measurement of microwave nanoelectronic devices
%A Savin, A..
%K vector network analyzer, probe station, on-wafer measurements, transmission line, verification, residual errors, unscented transformation
%J Infocommunications and Radio Technologies
%D 2019
%N 2
%P 10
%I Federal State Educational Institution of Higher Education Sevastopol State University