TY  JOUR
TI  Method of metrological characteristics determination of probe system for wafer-level S-parameters measurement of microwave nanoelectronic devices
KW  vector network analyzer
KW  probe station
KW  on-wafer measurements
KW  transmission line
KW  verification
KW  residual errors
KW  unscented transformation
JO  Infocommunications and Radio Technologies
AU  Savin, A..
PY  2019
IS  2
PB  Federal State Educational Institution of Higher Education Sevastopol State University