@article{Torkhov2019size,
author={Torkhov, N.. and Krivchuk, A..},
title={Size effects in the processes of large ion implantation into n-GaAs(100) epitaxial layers},
journal={Infocommunications and Radio Technologies},
publisher={Federal State Educational Institution of Higher Education Sevastopol State University},
year={2019},
pages={416-426},
volume={2},
issue={3},
}