TY  JOUR
TI  Size effects in the processes of large ion implantation into n-GaAs(100) epitaxial layers
KW  implantation
KW  large ions
KW  size effect
KW  gallium arsenide
KW  heteroepitaxial structures
JO  Infocommunications and Radio Technologies
AU  Torkhov, N..
AU  Krivchuk, A..
PY  2019
IS  2
PB  Federal State Educational Institution of Higher Education Sevastopol State University