@article{Kulinich2022integrated,
author={Kulinich, I.V. and Somogonyants, A.A. and Shesterikov, E.V. and Mokhovikov, D.M.},
title={INTEGRATED OPTICAL WAVEGUIDES  BASED ON Si3N4 FILMS},
journal={Infocommunications and Radio Technologies},
publisher={Federal State Educational Institution of Higher Education Sevastopol State University},
year={2022},
pages={318-324},
volume={5},
issue={3},
}