%0 Journal Article
%T INTEGRATED OPTICAL WAVEGUIDES  BASED ON Si3N4 FILMS
%A Kulinich, I.V.
%A Somogonyants, A.A.
%A Shesterikov, E.V.
%A Mokhovikov, D.M.
%K PIC, phase grating, silicon nitride on insulator.
%J Infocommunications and Radio Technologies
%D 2022
%N 5
%P 6
%I Federal State Educational Institution of Higher Education Sevastopol State University