TY  JOUR
TI  INTEGRATED OPTICAL WAVEGUIDES  BASED ON Si3N4 FILMS
KW  PIC
KW  phase grating
KW  silicon nitride on insulator.
JO  Infocommunications and Radio Technologies
AU  Kulinich, I.V.
AU  Somogonyants, A.A.
AU  Shesterikov, E.V.
AU  Mokhovikov, D.M.
PY  2022
IS  5
PB  Federal State Educational Institution of Higher Education Sevastopol State University