LDR 00721naa#a2200181#i#450#
001     EN\\bibl\52852
005     20250131225827.5
011 ## _a2587-9936
100 ## _a20190325b2019####ek#y0engy0150####ca
101 0# _aRUS
102 ## _aRU
200 1# _aMethod of metrological characteristics determination of probe system for wafer-level S-parameters measurement of microwave nanoelectronic devices
       _eJournal article
210 1# _aSevastopol
       _cFederal State Educational Institution of Higher Education Sevastopol State University
       _d2019
215 ## _a10 с.
608 ## _aJournal article
       _2local
675 ## _aЮстировка, градуировка и поверка. 621.317.089.6
       _zRUS
700 #1 _aSavin
       _gAleksandr A 
856 4# _arusjbpc.ru
       _u