00721naa#a2200181#i#450# EN\\bibl\52852 20250131225910.5 2587-9936 20190325b2019####ek#y0engy0150####ca RUS RU Method of metrological characteristics determination of probe system for wafer-level S-parameters measurement of microwave nanoelectronic devices Journal article Sevastopol Federal State Educational Institution of Higher Education Sevastopol State University 2019 10 с. Journal article local Юстировка, градуировка и поверка. 621.317.089.6 RUS Savin Aleksandr A rusjbpc.ru