LDR 00657naa#a2200193#i#450#
001     EN\\bibl\52882
005     20241205050604.4
011 ## _a2587-9936
100 ## _a20190925b2019####ek#y0engy0150####ca
101 0# _aRUS
102 ## _aRU
200 1# _aSize effects in the processes of large ion implantation into n-GaAs(100) epitaxial layers
       _eJournal article
210 1# _aSevastopol
       _cFederal State Educational Institution of Higher Education Sevastopol State University
       _d2019
215 ## _a10 с.
608 ## _aJournal article
       _2local
675 ## _aфизические. 53.043
       _zRUS
700 #1 _aTorkhov
       _gNikolay A 
700 #1 _aKrivchuk
       _gAleksandr S 
856 4# _arusjbpc.ru
       _u