00657naa#a2200193#i#4500001001500000005001700015011001400032100004100046101000800087102000700095200011100102210010800213215001100321608002700332675003800359700002400397700002700421856001500448EN\\bibl\5288220241109120056.6##a2587-9936##a20190925b2019####ek#y0engy0150####ca0#aRUS##aRU1#aSize effects in the processes of large ion implantation into n-GaAs(100) epitaxial layerseJournal article1#aSevastopolcFederal State Educational Institution of Higher Education Sevastopol State Universityd2019##a10 с.##aJournal article2local##aфизические. 53.043zRUS#1aTorkhovgNikolay A #1aKrivchukgAleksandr S 4#arusjbpc.ru