00657naa#a2200193#i#450# EN\\bibl\52882 20241006213740.7 2587-9936 20190925b2019####ek#y0engy0150####ca RUS RU Size effects in the processes of large ion implantation into n-GaAs(100) epitaxial layers Journal article Sevastopol Federal State Educational Institution of Higher Education Sevastopol State University 2019 10 с. Journal article local физические. 53.043 RUS Torkhov Nikolay A Krivchuk Aleksandr S rusjbpc.ru