LDR 00688naa#a2200205#i#450#
001     EN\\bibl\53379
005     20240728062549.7
011 ## _a2587-9936
100 ## _a20220928b2022####ek#y0engy0150####ca
102 ## _aRU
200 1# _aINTEGRATED OPTICAL WAVEGUIDES  BASED ON Si3N4 FILMS
       _eJournal article
210 1# _aSevastopol
       _cFederal State Educational Institution of Higher Education Sevastopol State University
       _d2022
215 ## _a6 с.
608 ## _aJournal article
       _2local
675 ## _aФотоэлектроника. 621.383
       _z
700 #1 _aKulinich
       _gIvan V.
700 #1 _aSomogonyants
       _gAlina A.
700 #1 _aShesterikov
       _gEvgeniy V.
700 #1 _aMokhovikov
       _gDenis Maksimovich
856 4# _arusjbpc.ru
       _u