00688naa#a2200205#i#450# EN\\bibl\53379 20240728062939.7 2587-9936 20220928b2022####ek#y0engy0150####ca RU INTEGRATED OPTICAL WAVEGUIDES BASED ON Si3N4 FILMS Journal article Sevastopol Federal State Educational Institution of Higher Education Sevastopol State University 2022 6 с. Journal article local Фотоэлектроника. 621.383 Kulinich Ivan V. Somogonyants Alina A. Shesterikov Evgeniy V. Mokhovikov Denis Maksimovich rusjbpc.ru