V.E. Zuev Institute of Atmospheric Optics SB RAS
Tomsk, Tomsk, Russian Federation
Tomsk, Tomsk, Russian Federation
V.E. Zuev Institute of Atmospheric Optics SB RAS
Tomsk, Tomsk, Russian Federation
Tomsk, Tomsk, Russian Federation
The paper presents studies at developing a technology for the formation of a rib integrated optical waveguide based on a Si3N4 film. The effect of ICP deposition modes on the structure of SiO2 and Si3N4 films and the effects of RIE etching of the waveguide on the rib profile and surface roughness are studied.
PIC, phase grating, silicon nitride on insulator.
1. M. Antelius, K. B. Gylfason, and H. Sohlström, “An apodized SOI waveguide-to-fiber surface grating coupler for single lithography silicon photonics,” Optics Express, vol. 19, no. 4, p. 3592, Feb. 2011, doi:https://doi.org/10.1364/oe.19.003592.
2. N. V. Nikonorov and S. M. Shandarov, Waveguide photonics: a course of lectures, St. Petersburg: SPbGU ITMO, 2008. (In Russ.).
3. L. Chrostowski and M. Hochberg, Silicon photonics design: from devices to systems. Cambridge: Cambridge University Press, 2015, doi:https://doi.org/10.1017/CBO9781316084168.
4. I. V. Kulinich, A. A. Gulyaeva, E. V. Shesterikov, V. A. Dybov, and A. I. Kazimirov, “Comb Y-division based on thin-film lithium niobate,” Nanoindustry Russia, vol. 13, no. 5s, pp. 370-374, Dec. 2020, doi:https://doi.org/10.22184/1993-8578.2020.13.5s.370.374. (In Russ.).
5. O. V. Tertishnaya, I. V. Kulinich, A. A. Sogomonyants, and A. A. Gulyaeva “Review of geometric parameters of lattice elements based on Si/SO2 and Si3N4/SiO2 materials, Electronic means and control systems. Materials of reports of the International scientific-practical conference, no. 1-1. pp. 37-41, 2021. (In Russ.).
